P-15 Longscan Stylus/Contact Profiler
KLA-Tencor’s P-15 Longscan Contact Stylus Profiler is capable of measuring the roughness and waviness of a sample’s surface. The P-15 can also measure positive and negative step height features with a high degree of accuracy and precision. Both 2D and 3D scan profiles can be obtained. The P-15 is equipped with a MicroHead IIxr scanner that has a 1mm vertical range and is capable of scanning at forces between 0.5-50mg. The maximum horizontal scan length is 200mm. The instrument’s motorized stage can accommodate substrates up to 8 inches in diameter and allows samples to be held down by vacuum.
Features
- 2D and 3D analysis
- Accommodate substrates up to 8 inches in diameter
- Dual view optics
- Maximum horizontal scan length: 200mm
- Maximum substrate weight: 1lb
- Scan Force: 0.5-50mg
- Vertical scan range: 0-1000μm
Measurements
- Step Height
- Stress
- Surface Contour
- Surface Roughness
- Surface Waviness
2D Line Scan
3D Topography Scan
