NT3300 Optical Profiler

OPThe NT3300 Non-Contact Optical Profiler features advanced automation and outstanding software for highly accurate, 3D surface topography measurements. The most advanced surface metrology system available, the NT3300 rapidly measures heights from Angstroms to millimeters, with vertical resolution down to 0.1 nm.  The NT3300 is ideally suited for quality inspection, failure analysis, and rapid production measurement of MEMS, semiconductor packaging, medical devices, automotive systems and many other applications.

Measurement Modes

Phase Shifting Interferometry (PSI) uses the interference of light to map the surface of a sample.  PSI is used for extremely smooth samples like mirrors or optics. In PSI, a piezoelectric transducer (PZT) within the integrated optics assembly (IOA) head precisely shifts the interference pattern six times; each shift is captured to produce one frame of data.  The frames are then reconstructed to form a topographical map of the measured surface.  PSI is typically used to measure samples with Ra between 0.1-160nm.

Vertical Scanning Interferometry (VSI) also uses the interference of light to map the surface of a sample.  VSI is used for relatively rough surfaces (Ra greater than 0.1mm) or surfaces with discontinues, features, or steps greater than 160nm (l/4).  In VSI, the optics physically scan through the focal points of the object while obtaining “snapshots”, called frames, from the camera inside the IOA.  The frames are then used to reconstruct a map of the sample’s surface.  

Measurements

  • Step Height
  • Surface Contour
  • Surface Roughness
  • Volume Analysis

Features

  • 4x4 inch X,Y Travel
  • Field of View: 0.05-8.24mm
  • Vertical RMS Repeatability: 0.01nm
  • Angstrom Vertical Resolution (<1Ǻ Ra)
  • Lateral Spatial Sampling: 0.08 to 13.1um
  • Vertical Measurement Range: 0.1nm to 2.0mm
  • Stitching Capabilities for Analysis of Large Areas
  • 0.5 to 100x Magnification by Means of 3 Different Objectives

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