Optec MicroMaster Excimer Laser
This machine operates using an ultraviolet laser to vaporize a variety of materials. This machine includes many features and masks which aid in the creation of nearly any shape and size ablation.
Applications
- Removing lamination from vias
- Creating three dimensional structures
- Create laser markings on wafers and other substrates
Specifications
- Wavelength = 248 nm
- Pulse energy – 18 mJ
- Repetition rate – up to 300 Hz
- Energy density at target = .25-5 J/cm2
- Side view camera magnification = 40x
- Through lens camera magnification =150x-500x
- XY positioning resolution = 1 µm