Kurt J. Lesker CMS-18 Sputterer

Kurt J. Lesker CMS-18 Sputterer

Sputter deposition system that has 3 targets. 1 RF target, 2 DC targets (1 Pulsed DC and the other straight DC) 150 mm 6 slot loadlock. Deposition rate monitor, rotating chuck, liquid cooled and heated chuck assembly up to 850 C, Symyx R+D high-througput combinatorial software and hardware.

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