Yield Engineering Systems HMDS Oven
Hexamethyldisilazane (HMDS) is used to improve photoresist adhesion to the silicon wafers. Programmable cycles for HMDS application. Capable throughput of 400+ wafers per hour.
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- Facilities & Equipment
- Bioactive Materials Characterization
- Combinatorial Science
- Design
- Polymer Synthesis
- Polymer Screening
- Coating Preparation
- Coating Deposition
- Coating Screening
- Analysis
- Electronics Design
- Electronics Prototype Fabrication
- Advanced Chip Packaging & Assembly
- Process Support Equipment
- Test & Inspection
- Fluidic Self Assembly
- Wafer Processing
- Materials Characterization
- RFID Lab - RWSL