MTI Proforma 300
Non-contact capacitance based measurement system that measures thickness, total thickness variation, (TTV), continuous and 5 point measurement. 50-300 mm diameter wafer range and +/- 0.25µm accuracy.
<<Back
- Facilities & Equipment
- Bioactive Materials Characterization
- Combinatorial Science
- Design
- Polymer Synthesis
- Polymer Screening
- Coating Preparation
- Coating Deposition
- Coating Screening
- Analysis
- Electronics Design
- Electronics Prototype Fabrication
- Advanced Chip Packaging & Assembly
- Process Support Equipment
- Test & Inspection
- Fluidic Self Assembly
- Wafer Processing
- Materials Characterization
- RFID Lab - RWSL