Thermco MB-80 Furnace
Annealing and densification furnace. Capable of wafer sizes up to 150mm. Temperature range of 200 - 850 °C. Gases used: N2H2, N2, Ar, CH4. System can also be setup for 1200 °C with 100 mm wafers.
<<Back
Annealing and densification furnace. Capable of wafer sizes up to 150mm. Temperature range of 200 - 850 °C. Gases used: N2H2, N2, Ar, CH4. System can also be setup for 1200 °C with 100 mm wafers.
<<Back