Optec MicroMaster Excimer Laser

Optec MicroMaster Excimer Laser

This machine operates using an ultraviolet laser to vaporize a variety of materials. This machine includes many features and masks which aid in the creation of nearly any shape and size ablation.


  • Removing lamination from vias
  • Creating three dimensional structures
  • Create laser markings on wafers and other substrates


  • Wavelength = 248 nm
  • Pulse energy 18 mJ
  • Repetition rate up to 300 Hz
  • Energy density at target = .25-5 J/cm2
  • Side view camera magnification = 40x
  • Through lens camera magnification =150x-500x
  • XY positioning resolution = 1 m