P-15 Longscan Stylus/Contact Profiler

CPKLA-Tencor’s P-15 Longscan Contact Stylus Profiler is capable of measuring the roughness and waviness of a sample’s surface. The P-15 can also measure positive and negative step height features with a high degree of accuracy and precision. Both 2D and 3D scan profiles can be obtained. The P-15 is equipped with a MicroHead IIxr scanner that has a 1mm vertical range and is capable of scanning at forces between 0.5–50mg. The maximum horizontal scan length is 200mm. The instrument’s motorized stage can accommodate substrates up to 8 inches in diameter and allows samples to be held down by vacuum.


  • 2D and 3D analysis
  • Accommodate substrates up to 8 inches in diameter
  • Dual view optics
  • Maximum horizontal scan length: 200mm
  • Maximum substrate weight: 1lb
  • Scan Force: 0.5–50mg
  • Vertical scan range: 0–1000μm


  • Step Height
  • Stress
  • Surface Contour
  • Surface Roughness
  • Surface Waviness

2D Line Scan

2D Line Data

3D Topography Scan

3D Scan