JSM-6010LA InTouchScopeTM Scanning Electron Microscope

JEOL's JSM-6010LA InTouchScopeTM Scanning Electron Microscope (SEM) is an analytical, low vacuum SEM featuring integrated Energy Dispersive Spectroscopy (EDS) with the latest Silicon Drift Detector (SDD) technology. The JSM-6010LA has the capability of qualitative and quantitative elemental analysis using simultaneous multiple live image and movie capture. The system also comes equipped with an infrared chamberscope and a 6 inch wafer stage.


  • Resolution (HV)
    • 4nm at 20kV
    • 8nm at 3kV
    • 15nm at 1kV
  • Resolution (LV)
    • 5nm at 20kV
  • Magnification
    • 5x to 300,000x
  • Acceleration Voltage
    • 0.5kV-20kV
  • LV Detector
    • BSED
  • Maximum Specimen Size
    • Observation: 125mm
    • Maximum: 152mm
    • Height: 49mm

Example Images

Copper Pillars
Fly Ash
Laser Ablated Kapton