Gen5 C-Mode Scanning Acoustic Microscope

SAMSonoscan’s Gen5 C-Mode Scanning Acoustic Microscope (C-SAM) is the next generation in Acoustic Micro Imaging (AMI). The Gen5 C-SAM is capable of performing advanced non-destructive inspection of packaged components and parts.

Advanced capabilities such as Virtual Rescanning Mode (VRM), TurboSpeed and Frequency Domain Imaging (FDI) add value and confidence to the inspection process. With its large, easy-access, illuminated scanning area, the Gen5 has the capability to efficiently scan anything from a single part to a 300mm wafer or two full JEDEC trays. (


  • Aerospace
  • Automotive
  • Composites
  • Medical
  • Microelectronics
  • Military
  • Solar Energy


  • 2.5X increased image acquisition speed with high pixel densities
  • Advanced algorithms to quantify the interface data
  • Collects and digitally stores comprehensive acoustic data enabling you to perform a complete analysis of a sample, even when it is no longer available
  • Defect detection; reliably detects delaminations as thin as 200 Angstroms
  • Select any single frequency or a range of frequencies to capture and utilize for imaging


      Frequency           Resolution

  • 30MHz                   86µm
  • 50MHz                   52µm
  • 75MHz                   35µm
  • 100MHz                 26µm
  • 230MHz                 23µm
  • 300MHz                 9µm

Example Images

Sonoscan 1     Sonoscan 2