Microfabrication Laboratory

Deposition Equipment

   T04   Kurt Lesker CMS-18 Sputterer (PVDI)
   T26   Oxford Plasmalab 100 PECVD2
   T24   Bump Plating Machine
   T06   MPM Precision Stencil Printer
   T19   Gold Target
   T28   Platinum Target

Photolithography Equipment

   T13   SUSS MA-8 Mask Aligner
   T11   SUSS RC-8 Spin Coater
   T20   Yield Engineering Systems HMDS Oven

Dry Etch Equipment

   T14   Trion RIE Plasma Etcher

Wet Processing Equipment

   T17   Developers: Spray Processor System, VRP 70 Spray Processor System, Solitec 5110ND Developer Track
   T05   KOH Bench - Silicon Wafer Etching
   T02   Acid Bench
   T12   Solvent Station
   T01   Utility Bench

Annealing / Curing Equipment

   T03   Flex Ovens: Blue M Friction Aire Oven, Heraeue Vacuum Bake Oven
   T27   Minibrute Tube Furnace

Film Characterization Equipment

   T25   Ellipsometer
   T09   KLA Tencor Profilometer 
   T07   Nanometrics Nanospec - Film Thickness
   T08   Olympus Wafer Inspection & Imaging System 
   T68   Micromanipulator
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