Microfabrication Laboratory
Deposition Equipment
T04 | Kurt Lesker CMS-18 Sputterer (PVDI) | |
T26 | Oxford Plasmalab 100 PECVD2 | |
T24 | Bump Plating Machine | |
T06 | MPM Precision Stencil Printer | |
T19 | Gold Target | |
T28 | Platinum Target |
Photolithography Equipment
T13 | SUSS MA-8 Mask Aligner | |
T11 | SUSS RC-8 Spin Coater | |
T20 | Yield Engineering Systems HMDS Oven |
Dry Etch Equipment
T14 | Trion RIE Plasma Etcher |
Wet Processing Equipment
T17 | Developers: Spray Processor System, VRP 70 Spray Processor System, Solitec 5110ND Developer Track | |
T05 | KOH Bench - Silicon Wafer Etching | |
T02 | Acid Bench | |
T12 | Solvent Station | |
T01 | Utility Bench |
Annealing / Curing Equipment
T03 | Flex Ovens: Blue M Friction Aire Oven, Heraeue Vacuum Bake Oven | |
T27 | Minibrute Tube Furnace |
Film Characterization Equipment
T25 | Ellipsometer | |
T09 | KLA Tencor Profilometer | |
T07 | Nanometrics Nanospec - Film Thickness | |
T08 | Olympus Wafer Inspection & Imaging System | |
T68 | Micromanipulator |